Atmospheric Pressure Helium Plasma Treatment on 3C-SiC/Si Surface
نویسندگان
چکیده
منابع مشابه
High Voltage Pulsed Atmospheric Pressure Helium Plasma Jet
Non-equilibrium cold plasma jets generated under atmospheric pressure by means of high voltage pulsed power generator are extended up to a few centimeters long in the surrounding air. The generator is consisting of a negative dc source, a Blumlein-type pulse-forming network (E-PFN), and a dynamic spark gap switch. The plasma jet generated by the device using helium as the operating gas depends ...
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In this study, a cold atmospheric He plasma jet is investigated. The jet is of dielectric barrier discharge type, consisting of a dielectric tube with two metal ring electrodes. The continuity, momentum and energy conservation equations as well as the Poisson equation for obtaining the potential and the electric field, accompanied with the ideal gas laws, are used for the simulation. The result...
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ژورنال
عنوان ژورنال: Applied Mechanics and Materials
سال: 2014
ISSN: 1662-7482
DOI: 10.4028/www.scientific.net/amm.695.118